Epitaxy of semiconductors:

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Epitaxy of Semiconductors: Introduction to Physical Principles (Graduate Texts in Physics)

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Epitaxy of the Group-IV Semiconductors: Foundations

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Epitaxy of the Group-IV Semiconductors: Foundations (IOP ebooks)

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Quasi van der Waals Epitaxy of Nitride Semiconductor and Its Applications (Wide Bandgap Semiconductors)

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